prBAS EN ISO 25178-603:2026
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
General information
Status:Project
Number of pages:21
Adoption method:Proglašavanje
Language:engleski
Edition:2.
Realization date:30.09.2025
Forseen date for next stage code:10.10.2025
Technical committee:BAS/TC 38, Metrology and measurements
ICS:
17.040.20, Properties of surfaces
17.040.40, Geometrical Product Specification (GPS)
17.040.40, Geometrical Product Specification (GPS)
Abstract
This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
Lifecycle
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Original document and degree of correspondence
EN ISO 25178-603:2025, identical
ISO 25178-603:2025, identical
Relation to BAS standards
Work material
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