BAS EN ISO 25178-603:2014
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
General Information
Status: Published
No. of pages: 30
Language: English
Edition: 1.
Adoption method: Endorsment
Publication date: 04.06.2014
Technical committee:
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Abstract
ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Lifecycle
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Original document and degree of correspondence
- EN ISO 25178-603:2013, identical
- ISO 25178-603:2013, identical