prBAS ISO/TS 25138:2027
Surface chemical analysis — Analysis of metal oxide films by glow discharge optical emission spectrometry
General information
Status:Project
Number of pages:43
Adoption method:Korice
Language:engleski
Edition:3.
Realization date:27.10.2026
Forseen date for next stage code:05.11.2026
Technical committee:BAS/TC 49, Chemical engineering, laboratory equipment and cosmetics
ICS:
71.040.40, Chemical analysis
Abstract
This document specifies a glow discharge optical emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 5 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.
Lifecycle
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Original document and degree of correspondence
ISO/TS 25138:2025, identical
Relation to BAS standards
Work material
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