prBAS ISO/TS 22933:2025

Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

General information

Status:Project

Number of pages:19

Adoption method:Korice

Language:engleski

Edition:1.

Realization date:07.11.2024

Forseen date for next stage code:19.11.2024

Technical committee:BAS/TC 49, Chemical engineering, laboratory equipment and cosmetics

ICS:

71.040.40, Chemical analysis

Abstract

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

Lifecycle

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Original document and degree of correspondence

ISO/TS 22933:2022, identical

Work material

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